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MEMS '99 : Twelfth IEEE Interna...

IEEE Workshop on Mic...

Hardback
Published 28 Feb 1999

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Micro Electro Mechanical Systems

IEEE Robotics and Au...

Hardback
Published 30 Apr 1994

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IEEE Micro Electro Mechanical S...

IEEE Robotics and Au...

Hardback
Published 31 Dec 1995

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The Tenth Annual International ...

IEEE Workshop on Mic...

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Published 15 Jun 2006

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The Eleventh Annual Internation...

IEEE Workshop on Mic...

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Published 28 Feb 1998

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IEEE Micro Electro Mechanical S...

W Benecke, H.-C Petz...

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Published 28 Feb 1993

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IEEE the Ninth Annual Internati...

IEEE Workshop on Mic...

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Published 01 Jan 1996

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IEEE Micro Electro Mechanical S...

IEEE Robotics and Au...

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Published 01 Jan 1994

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IEEE Micro Electro Mechanical S...

IEEE Robotics and Au...

Book
Published 01 Jan 1991

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